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发明名称
METODO DI DECONTAMINAZIONE DI UNA CAMERA UTILIZZATA NEI PROCESSI SOTTO VUOTO DI DEPOSIZIONE, ATTACCO O CRESCITA DI FILMS DI ELEVATA PUREZZA, DI PARTICOLARE APPLICAZIONE NELLA TECNOLOGIA DEI SEMICONDUTTORI.
摘要
申请公布号
IT8622532(D0)
申请公布日期
1986.12.02
申请号
IT19860022532
申请日期
1986.12.02
申请人
SGS MICROELETTRONICA S.P.A.
发明人
ANTONINO MOTTA
分类号
C23C16/44;C30B23/02;C30B25/08;(IPC1-7):C30B/
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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