| 摘要 |
PURPOSE:To form an org. membrane having no monomolecular membrane folded back to the end of a substrate, in a film forming apparatus according to a horizontal adhesion method for taking the monomolecular membrane on the surface of water while transferring the same, by providing a frame dividing a molecular group. CONSTITUTION:A monomolecular membrane 10 set to arbitrary surface pressure has been formed on the surface of water in a water tank 1. An upper plate 15 is pushed down to the direction shown by an arrow A to lower a frame 13 and the monomolecular membrane 10 on the surface of water is partitioned by said frame 13. Next, a substrate holder 8b is pushed down to the direction shown by an arrow B to lower a substrate 7 and the monomolecular membrane partitioned by the frame 13 is transferred to the substrate 7. Thereafter, the substrate 7 and the frame 13 are raised from the surface of water to finish one process for transferring the monomolecular membrane onto the substrate 7. Further, when surface pressure is applied to the monomolecular film to per form the same operation, a built-up membrane can be formed. |
