| 摘要 |
PURPOSE:To improve laser oscillation efficiency by forming the shape of a H2O adsorbent to a globular shape and preventing the generation of fine particles due to friction of the adsorbent. CONSTITUTION:The shape of an adsorbent 13 adsorbing H2O molecules for controlling the partial pressure of H2O molecules made to be contained in a laser medium gas is formed to an approximately globular shape. Consequently, fine particles are difficult to be generated due to friction among the adsorbents 13 or with a vessel 12. Accordingly, laser oscillation efficiency is improved. |
