| 摘要 |
PURPOSE:To stabilize a laser output for a prolonged term by connecting a circulating pipe for a laser medium gas having a root blower to a discharge tube and electrically controlling the synchronism of a rotor for the root blower. CONSTITUTION:A root blower 5 has a suction port 5a and a discharge port 5b, and two cocoon-shaped rotors 6 are each fixed to shafts 13, and turned and driven by motors 15 through couplings 14. The revolution of the motors 15 is controlled by a controller 16. A gas in a gas circulation path is evacuated up to approximately 0.01Torr by a vacuum pump 10 at the initial stage of operation. A laser medium gas is encapsulated to the gas circulation path up to predetermined pressure from a gas cylinder 11. The motors 15 are rotated synchronously, and the laser medium gas is circulated and the operation of laser oscillations is conducted. That is, several motor 15 is turned so that the two cocoon-shaped rotors 6 are mutually synchronized and contrarotated electrically by using the controller 16. |
