发明名称 APPARATUS AND METHOD FOR MANUFACTURING INTEGRATED CIRCUIT DEVICE
摘要 A system for producing integrated circuit devices includes first 15 and second 17 integrated circuit processing stations. The first station produces an output stream of individual, separate devices for delivery to the second station. A drum buffer 25 receives the individual devices from the first station, selectively stores the individual devices, and dispenses the stored devices on a substantially last-in first-out basis to the second station. The drum buffer includes a plurality of device carrying channels axially along the length of the drum 25 to receive the devices being selectively stored by filling the respective channels as the drum is rotatably indexed in one direction, and to empty the stored devices from the respective channels as the drum is rotatably indexed in an opposite direction.
申请公布号 JPS6220334(A) 申请公布日期 1987.01.28
申请号 JP19860165467 申请日期 1986.07.14
申请人 TEXAS INSTR INC <TI> 发明人 ANSONII ERU ADAMUSU;JIYON JII SUCHIYUWAATO
分类号 H01L21/50;H01L21/00 主分类号 H01L21/50
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