| 摘要 |
PURPOSE:To maintain flat accuracy in machining and improve operating efficiency of a machine tool, by applying wax to one of a pair of external surfaces which are parallel in an axial direction each other and adsorbing a workpiece holder to the other surface on the same axis by an adsorbing chuck. CONSTITUTION:In a pair of parallel external surface 20a, 20b which are formed with a space in an axial direction of a workpiece holder 20, one of the external surfaces 20a has a thin plate-shaped workpiece W bonded thereto by wax 25 and the other external surface 20b is adsorbed to a flat adsorbing surface 16a of the front of a vacuum chuck 15. Since the wax 25 is fluidized when it is heated and solidified when cooled, the thin plat-shaped workpiece W is bonded with its attached surface Wa keeping deformation in a previous machining. A center hole 23 of a holder 20 engages with a central projection of a chuck assembly 16 for clamping the workpiece W to a spindle 11 by adsorbtion. As a result, even if there is a partial gap between the adsorbing surface 16a and the external surface 20b, a bonded portion 21 and the workpiece W are not subjected to deformation because an adsorbing portion 22 bends to some extent. |
