| 摘要 |
PURPOSE:To make a minute angle rotatable, by installing a pair of parallel spring bodies and a support spring body, supporting a table, in parallel and symmetry with each other holding a linear actuator in between, in case of the minute angle rotary table for positioning an optical system, etc. CONSTITUTION:The selfsame spring bodies 18 and 19 are locked as holding a first locking member 15 in between, and the other end is locked to an L- shaped first movable member 21, setting it down to a first parallel spring body 12. And, the selfsame second parallel spring body 13 is installed in a parallel, symmetrical position as holding a linear actuator 3 in between via spacers 3a and 3b, locked to movable members 21 and 31. A table 4 is supported on first and second support spring bodies 44 and 45 and locked to these movable members 21 and 31 in a rectangular direction with the parallel spring body. When the linear actuator 3 is contracted as far as DELTAx, these movable parts 21 and 31 are displaced, rotating the table 4 as far as a minute angle centering on the center 32 as in an arrow 51. When the actuator 3 extends as far as DELTAx, the table rotates by the minute angle in the opposite direction of an arrow 52 and positioned thereat. Since there is no sliding surface, no friction happensand, what is more, a stick slip is not utterly entailed there too. |
