PHOTO-CVD DEVICE,申请号JP19850221181-传众专利搜索

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发明名称	PHOTO-CVD DEVICE
摘要
申请公布号	JPS6281020(A)	申请公布日期	1987.04.14
申请号	JP19850221181	申请日期	1985.10.04
申请人	FUJI ELECTRIC CO LTD	发明人	ICHIMURA TAKESHIGE
分类号	H01L21/205;H01L21/263;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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