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发明名称
PHOTOLITHOGRAPHIC PROCESS FOR OBTAINING STRUCTURES BY THE LIFT-OFF TECHNIQUE
摘要
申请公布号
EP0123301(A3)
申请公布日期
1987.04.15
申请号
EP19840104502
申请日期
1984.04.19
申请人
SIEMENS AKTIENGESELLSCHAFT BERLIN UND MUNCHEN
发明人
BULST, WOLF-ECKHART, DIPL.-PHYS.;KEINATH, PETER, DIPL.-ING.;LINDEMANN, GERTRUD
分类号
G03F7/09;(IPC1-7):G03F7/02
主分类号
G03F7/09
代理机构
代理人
主权项
地址
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