| 摘要 |
PURPOSE:To attain temperature measurement reducing its error by finding out relation between the change of radiation ratio of a temperature measuring object and temperature by real measurement and correcting a temperature value obtained from an optional radiation ratio to obtain a real temperature value. CONSTITUTION:Inert gas 10 is supplied to a chamber 1 evacuated by a valve system 2 and a vacuum pump system 3, electric power is applied from high frequency power supplies 8, 9 to a cathode 5 or a base electrode 7 and a target 4 is sputtered to form a thin film on a base 6 while forming plasma 11. Since a temperature measuring window 21 is formed on the chamber 1 and heat radiation energy 23 is emitted from a measuring point 22 of the target 4 to be an object to be measured, the energy 23 is absorbed by a radiation thermometer 24 and temperature information is outputted from the thermometer 24. The window 21 can transmit the measuring wavelength of the thermometer 24, the temperature information obtained from the thermometer 24 is corrected by a correcting arithmetic part 25 to calculate a value reducing its error from a real value and the output of the arithmetic part 25 is displayed on a display part 26.
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