| 摘要 |
PURPOSE:To prevent a degree of cleanliness from being easily decreased even if the operation of a blower is stopped after a space within a clean room is cleaned by a method wherein an outdoor air is fed into the clean space through a first filter and air in the clean space is discharged out of the clean space through a second filter. CONSTITUTION:Air is fed to a first filter 5 under the operation of blower 6, filtered with the filter and clarifies a clean space 1 with clean air, passes through a shelf 7 and a second filter 9 and then discharged out of the clean box. After cleaning, even if an operation of a blower 6 is stopped, a contamination within the clean space 1 with outdoor air is prevented under the action of the second filter 9. that is, after cleaning in the clean space 1, even if the operation of the blower 6 is stopped, inclusion of contaminated air is prevented and so a continuous operation required in the prior art is not necessary. |
