| 摘要 |
PURPOSE:To contrive to enhance the quality of a film by uniformizing the thickness of the film and eliminating air bubbles, by applying static pressure to the film applied to a surface to be coated. CONSTITUTION:A plate 1 to be coated is placed on the sucking surface 2a of the vacuum chuck 8 in a hermetically sealed space 6 and a film is formed to the plate 1 to be coated while the chuck 8 is rotated and a coating solution 4 is dripped. Because air bubbles are contained in the film and the thickness of the film has irregularity in this stage, after the dripping of the coating solu tion 4 is finished, the rotation of the vacuum chuck 8 is stopped and a pressuriz ing part 7 is started to raise the internal pressure of the hermetically sealed space 6, for example, to 10atm. By this method, because static pressure is applied to the film and isotropic pressure is acted on the entire surface of the film, not only air bubbles present in a foam state are collapsed and eliminat ed but also the thickness of the film is also uniformized. |
