发明名称 SEMICONDUCTOR PRESSURE SENSOR
摘要 PURPOSE:To achieve a higher reliability, by separating a circuit block incorporating a power source supply section and a signal processing section from a pressure measuring section to mold the circuit block. CONSTITUTION:A pressure measuring section 3 is arranged right below a pressure introduction port 2 within a container 1. The measuring section 3 is made up of a silicone single crystal substrate 4 with a diaphragm 4a formed and a pedestal 5 mounted on the undersurface thereof and detects the flexure of the diaphragm 4a with a gauge resistance as generated according to changes in the pressure. On the other hand, a circuit block 8 incorporating a power supply section and a signal processing section is mounted on a printed circuit board 7 and the block 8 is connected to the gauge on the diaphragm 4a through a lead and a wire pattern of the substrate 7. A block 8 is molded with a molding member 9. this makes the power supply section and signal processing section free from adverse effect by a medium to be measured thereby achieving a higher reliability.
申请公布号 JPS62175633(A) 申请公布日期 1987.08.01
申请号 JP19860019071 申请日期 1986.01.30
申请人 FUJIKURA LTD 发明人 OKADA KAZUHIRO;NURI KENJI;TANIGAWARA SHINJI;SHIMOMURA AKIO;KISHI HAJIME;TAKIZAWA ISAO;NAKAMURA MITSUO
分类号 G01L9/04;G01L9/00 主分类号 G01L9/04
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