| 摘要 |
<p>PURPOSE:To enable high-accuracy measurements constantly of various specimen surfaces with the optimum shear value, by constructing a means of dividing a reflecting wave front from a specimen into wave fronts in the polarization direction intersecting each other through a right angle with a plurality of optical elements available for change of relative position. CONSTITUTION:Wollaston prisms 21, 22 are so located that a distance 'alpha'between them may be changed between 1/4-wave-length board 6 and polarized- beam splitter 8. The prisms 21, 22 are formed by contacting 2 right-angle prisms crystal-angles of them being intersected through a right angle and the prism 22 is so installed that is rotated relative to the prism 21 around the axis perpen dicular to the surface of this sheet through an angle of 180 deg.. And, when a reflected light flux from a specimen surface 5 is eradiated into the prism 21, it is divided into 2 fluxes provided with a constant divergent angle and conse quently, the optimum shear-value can be obtained by changing the distance (alpha) through relative displacement of the prism 21, 22 corresponding to the shape of the surface of the specimen surface 5.</p> |
