| 摘要 |
PURPOSE:To eliminate a harmful in-plane magnetic component generated from grooving by embedding newly a vertical magnetization film in the grooving. CONSTITUTION:A (YSmLuCa)3(FeGe)5O15 garnet of 2mum thick is used as a magnetic film 1, the grooving 2 is digged by nearly 1.5mum by combining an ion implantation method and chemical etching method, the width of the grooving 2 is selected as 3mum and the length is 20mum based on the element constitution. After a vertical magnetization film 3 is coated on the entire film face by using a sputtering method by thickness (t), only the vertical magnetization film 3 of the film surface is removed selectively to complete the imbedding. In this case, the embedded vertical magnetization film 3 is TbFeCo adjusted to 4piMs1000(Oe). Thus, a new stripe magnetic domain fixing pattern without any harmful in-plane magnetic field component is obtained.
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