| 摘要 |
PURPOSE:To efficiently produce isolated ultra-fine particles by providing many thin tubes with the front end opened to a vaporization source and the rear end communicat ing with a high-vacuum chamber in parallel in the chamber for forming the vapor of an ultra-fine particle by an in-gas vaporization method, and increasing the degree of vacuum in a vacuum chamber to a value higher than that in the formation chamber. CONSTITUTION:When vacuum vaporization is carried out in the formation chamber 1, evacuation is performed so that the degree of vacuum in the high-vacuum chamber 10 is made higher than that in the formation chamber 1. Consequently, the vapor of a material vaporized from a crucible 4 reaches the lower surface of a large-bore group 8 of thin tubes above the crucible, however, strong suction is generated in the thin tube 7, since the rear end of each thin tube 7 is opened to the high-vacuum cham ber 10. As a result, the vapor (ultra-fine particles) is sucked from the lower suction port, and rapidly drawn into the high-vacuum chamber 10 along with the inert gas in the formation chamber 1. The isolated ultra-fine particles are then accumulated in a collecting chamber 13 and collected. Since the vaporized ultra-fine particles are then sucked by the many thin tubes 7, mass production is made possible. |
