| 摘要 |
PURPOSE:To make it possible to detect the surface at a high detecting accuracy, detecting accurately even a minute curve or meandering on the sample surface, and ranging in a wide area highly accurately, by correcting the data based on the detection of particle beams responding to the scanning position of the particle beams. CONSTITUTION:From samples 10 and 11 irradiated with electron beams 3, secondary electrons 4A and 4B are emitted as a signal, and detected by sensors 1A and 1B. A digital scanning signal generated from a microcomputer is converted into an analog scanning signal by a D/A converter, and fed to a scanning coil. The data of detecting intensities A and B of the sensor 1A and 1B are converted into digital signals by an A/D converter. Then the data of the detecting intensities A and B are delivered to the microcomputer, and subtraction-processed at first there to make into a data of the balance of the detecting intensities (A-B). Then the data of the balance of detecting intensities (A-B) is delivered to a correcting member to be correction-processed, and made into a data of a correction value of the balance of detecting intensities (A-B+2kx/l<2>). |
