LIQUID REPLENISHING APPARATUS

摘要

A liquid replenishing apparatus for supplying liquid raw material replenishment for liquid raw material of an article to at least one raw material tank, including a replenishment tank for storing the liquid raw material replenishment, a first pipe extending between the replenishment tank and the raw material tank, a second pipe for introducing pressurized gas into a space of the replenishment tank, a branch pipe communicating with the first and second pipes, a pressure regulator provided in the second pipe, and a flow regulator provided in the branch pipe.