| 摘要 |
PURPOSE:To permit the drive which has a high resolving power for positioning and a high speed responsiveness by combining a finely movable mechanism which supplies a fluid pressure into a hollow structure body and utilizes an elongation quantity due to the deformation of the hollow structure body, with a roughly movable mechanism consisting of a servomotor and a ball screw. CONSTITUTION:The drive which possesses a large stroke and high resolving power as a whole and high responsiveness is permitted by using a roughly movable part consisting of the combination a servomotor 1 or 2 for a large stroke shift and a ball screw 3 or 4 and a finely movable part A for the drive which possesses a small stroke and a high speed high resolving power. In common, a ball screw driving mechanism has a control-disable region because of the frictional torque, etc. In this case, the shift span of the finely movable part is set, and when the position of an object is set into this region, control is suspended, and fine correction drive to an aimed value is carried out by the finely movable part. in this system, the high speed drive which has a large stroke and high resolving power is permitted.
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