Method of forming electrodes aligned with respect to a level of implantation in a substrate and a method of forming a charge transfer filter

摘要

The invention provides a method of forming electrodes aligned with respect to an implantation level in a substrate, including the following main phases: formation of a dielectric layer on a substrate; formation of semiconducting or conducting elements which are to serve as mask for implantation; implantation; formation of a layer of conducting or semiconducting material; cutting out electrodes from said layer and from the semiconducting or conducting elements.