发明名称 |
Multilayer ceramic coatings from metal oxides for protection of electronic devices |
摘要 |
This invention relates to materials produced by diluting in a solvent a preceramic mixture of a hydrogen silsesquioxane resin and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2/metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices. |
申请公布号 |
US4753855(A) |
申请公布日期 |
1988.06.28 |
申请号 |
US19860938677 |
申请日期 |
1986.12.04 |
申请人 |
DOW CORNING CORPORATION |
发明人 |
HALUSKA, LOREN A.;MICHAEL, KEITH W.;TARHAY, LEO |
分类号 |
H01L21/312;C23C18/12;H01L21/314;H01L21/56;H01L23/29;H01L23/31;(IPC1-7):B05D3/06;B05D5/12 |
主分类号 |
H01L21/312 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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