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发明名称
LOW PRESSURE CHEMICAL VAPOR DEPOSITION OF METAL SILICIDE
摘要
申请公布号
EP0245934(A3)
申请公布日期
1988.08.03
申请号
EP19870302693
申请日期
1987.03.27
申请人
VARIAN ASSOCIATES, INC.
发明人
GACZI, PETER J.
分类号
H01L21/3205;C23C16/02;C23C16/42;H01L21/28;H01L23/52;(IPC1-7):H01L21/285
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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