发明名称 PRODUCTION OF HEAT CONDUCTIVE SUBSTRATE
摘要 PURPOSE:To facilitate the treatment of a bridge part and to contrive to reduce the generation rate of defectives by a method wherein a copper circuit plate is formed by performing an etching treatment in a desired form including the bridge part and the removal of the bridge part is performed by cutting in the thickness direction of the copper circuit plate. CONSTITUTION:A copper plate 6 subjected to masking 9 is showered with a ferric chloride solution on both surfaces to perform an etching treatment and the copper plat 6 in a desired form having a plurality of insular parts 7 and a bridge part 8, which is removed by dissolution only from one side and is made into a thickness of about half of the initial thickness of the copper plate 6, is produced. Then, after the surface on one side, where the bridge part 8 is removed by dissolution, of the copper plate 6 is junctioned on a ceramics substrate 10, the bridge part 8 of the copper plate 6 is cut and removed by a sharp-edged cutter in the thickness direction of the copper plate 6 to produce a heat conductive substrate. Thereby, a junction failure of bulge, peeling and so on and the generation of burrs at the cut end parts can be prevented.
申请公布号 JPS63196065(A) 申请公布日期 1988.08.15
申请号 JP19870029192 申请日期 1987.02.10
申请人 TOSHIBA CORP 发明人 MATSUMURA KAZUO;TANAKA TADASHI
分类号 H01L23/12;H05K3/06 主分类号 H01L23/12
代理机构 代理人
主权项
地址