PROCEDE ET APPAREIL DE FERMETURE DE PORTE DE FOUR DE TRAITEMENT DE DISPOSITIFS MICROELECTRONIQUES,申请号FR19860012335-传众专利搜索

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发明名称	PROCEDE ET APPAREIL DE FERMETURE DE PORTE DE FOUR DE TRAITEMENT DE DISPOSITIFS MICROELECTRONIQUES
摘要
申请公布号	FR2590008(B3)	申请公布日期	1988.09.16
申请号	FR19860012335	申请日期	1986.09.02
申请人	YATES CLEON RAY	发明人
分类号	H01L21/00;H01L21/677;(IPC1-7):F27B17/00;F27D1/18;F27D7/06	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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