| 摘要 |
PURPOSE:To efficiently convey a substrate into a crystal growth chamber by combining a rotatable and liftable retaining part for retaining plural substrate mounting blocks carrying a substrate and a reciprocating transfer rod. CONSTITUTION:A substrate conveying chamber retaining part 22 capable of being rotated around a rotating shaft 23, capable of being lifted up and down, and provided with a polygonal prismatic part is provided in a substrate conveying chamber 21. Plural substrate mounting blocks 24 carrying a substrate are retained by the plural mounting block retaining bodies 25 of the substrate conveying chamber retaining part 22. The transfer rod 29 is then advanced to retain one substrate mounting block 24A with the tip. The substrate conveying chamber retaining part 22 is then lowered, and the transfer rod 29 is further advanced to convey the substrate mounting block 24A into the crystal growth chamber 27.
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