| 摘要 |
PURPOSE:To read the potential of a wiring on an integrated circuit chip in a non-contact manner, and to discriminate even the change of a liquid crystal due to a trace quantity of heat generation by mounting a picture processor. CONSTITUTION:An analyzer analyzing the state of an integrated circuit by utilizing the display of optical modulation by an electric field and a temperature of a crystal liquid 2 applied onto an integrated circuit chip 1 is provided with a means extracting the picture of the liquid crystal 2 from an optical path in an eye contacting section 102 for a microscope 100 and inputting the picture to a picture memory storage 400 through an A/D converter 300, a means 600 data-processing the data of the picture memory storage 400 and a means outputting a data from the picture memory storage 400 to a picture display unit 500. The integrated circuit chip 1 is driven by a power supply 5, the color- tone contrast image of the liquid crystal 2 observed is input to the memory storage 400 through a camera 200 and the A/D converter 300, and data-processed by the computer 600, and a color tone contrast is discriminated at a quantitative value.
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