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发明名称
CHEMICAL VAPOR GROWTH DEVICE
摘要
申请公布号
JPS6446917(A)
申请公布日期
1989.02.21
申请号
JP19870203400
申请日期
1987.08.18
申请人
TOSHIBA CORP
发明人
AKAGAWA KEIICHI
分类号
H01L21/205;C23C16/46;C30B25/10;C30B25/14
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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