| 摘要 |
PURPOSE:To lower the electric resistance of transparent electrodes and to prevent the voltage drop in the electrodes and the increase in time constant or heat generation by forming cold conducting thin films which are electrically conducted to the respective transparent electrodes. CONSTITUTION:This transparent electrode substrate is constituted of a substrate 1, the transparent electrodes 2 and the cold superconducting thin films 3. Namely, the substrate is obtd. by first forming the transparent electrode 2 on the substrate 1 and patterning the electrodes, then forming the cold superconducting thin film 3 and patterning the same. The formation of the transparent electrodes 2 and the cold superconducting thin films 3 is executed by using sputtering. Photolithography is used for the patterning thereof. The transparent electrodes are patterned to the slender shapes. The cold superconducting thin films 3 are disposed like wires along the longitudinal direction of the transparent electrodes 2. The apparent electric resistance of the transparent electrodes 2 is thus extremely lowered by the presence of the cold superconducting thin films 3. |
