| 摘要 |
PURPOSE:To make a device small in size by a construction wherein a processing circuit of an input electric signal of a strain gage is provided in a part of a strain-generating substrate or in a weight part disposed in contact with or in proximity to said part, so as to amplify a weak strain gage signal. CONSTITUTION:The title device is provided with a cantilever 2 supported by a base 1 and with a weight 3 fixed to the cantilever 2, and diffusion-type piezoresistance gages 4a, 4b, 4c and 4d are formed integrally on the cantilever 2. The gages 4a-4d constitute a Wheatstone bridge circuit, and a signal processing circuit 5 and others are formed directly on the weight 3. When an acceleration is impressed, the cantilever 2 is bent by a force acting on the weight 3, and electric signals converted by the gages 4a-4d are led to electrode pads 7 through the circuit 5 and wirings 6 respectively and taken outside. Accordingly, the device can be made small in size by making the weight 3 operate also as a circuit chip. |
