| 摘要 |
PURPOSE:To perform PELS(proton energy loss spectroscopy) measurement while the surface condition continues unchanged by altering the magnetic flux density and pullout voltage during beam adjustment time, and carrying out scattered proton energy measurement for each element in such a condition that peak lies in a specific position of a location sensor. CONSTITUTION:Tables of magnetic flux density B(i) and ion pullout voltage Vex(i) are prepared for elements I, II,..., N on the surface of a specimen 10, and a catch plate 7 is opened for a time tau, and PELS measurement is performed under the tables B(I), Vex(I) for the element I. The catch plate 7 is shut for a time zeta, and parameter is changed from I to II, and proton beam flux is measured from the current passing the catch plate 7. Further, beam adjustment times XSI1, XSI2,... to alter the beam parameters B, Vex are placed in the measuring times T1, T2,... in the same manner. Because the energy loss DELTAE(i) when incident energy E0 is held constant, is known, spectra in the number of pieces n are arranged on an axis of abscissa (DELTAE) so that peaks lie at DELTAE(I), DELTAE(II),.... Thereby measurement can be made with a high energy dissolution. |
