| 摘要 |
PURPOSE:To prevent dust at the time of taking out a process tube from flowing into a clean room and to always keep the clean room clean by providing a main body, a furnace body inside the main body, a process tube which elevates freely, and a prevention plate to shield an opening section of the main body. CONSTITUTION:A main body 2 having an opening section 4 at the part of a clean room, a furnace 28 provided inside the main body 2, a process tube 6 which elevates freely to the furnace 28, and a prevention plate 38 which can be opened and closed to the opening section 4 and shields the opening section 4 when closed are provided. For example, a tubular vertical furnace 28 which consists of a heater of resistance heating type is provided in the upper side inside the main body 2, and a bottom plate 29 and a manifold 31 are provided at the lower side of the furnace 28. The quartz process tube 6 is located to elevate freely and almost coaxially to the furnace 28 and the manifold 31. The opening section 4 is provided at a front panel 3 of the main body 2 to communicate a maintenance room and the clean room, and the prevention plate 38 is provided to allow the opening section 4 to be opened and closed.
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