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发明名称	PRODUCTION OF TRICHLOROSILANE
摘要
申请公布号	JPH01313314(A)	申请公布日期	1989.12.18
申请号	JP19880140486	申请日期	1988.06.09
申请人	MITSUI TOATSU CHEM INC	发明人	INOUE KAORU;ABE TOSHIHIRO;IKEDA KEIICHI;MURAKAMI MASAMI;YANAGAWA NORIYUKI;ITO MASAYOSHI
分类号	C01B33/107	主分类号	C01B33/107
代理机构		代理人
主权项
地址

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