CRYSTAL OSCILLATOR FOR MEASURING DEPTH OF ETCHING AND CONTROLLING APPARATUS FOR AMOUNT OF DRY ETCHING USING THE SAME,申请号JP19880152766-传众专利搜索

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发明名称	CRYSTAL OSCILLATOR FOR MEASURING DEPTH OF ETCHING AND CONTROLLING APPARATUS FOR AMOUNT OF DRY ETCHING USING THE SAME
摘要
申请公布号	JPH01318909(A)	申请公布日期	1989.12.25
申请号	JP19880152766	申请日期	1988.06.20
申请人	NEC CORP	发明人	TAKADO NOBUKAZU
分类号	G01B17/02	主分类号	G01B17/02
代理机构		代理人
主权项
地址

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