| 摘要 |
<p>PURPOSE:To achieve a high-precision activation in a simple construction under dust-free environment by connecting a intake elimination means utilizing an oil-supply hole provided at a nut of a ball screw device and providing a grease plating to a rotary axis for drive. CONSTITUTION:An intake hose is connected to an intake side elimination means 21 utilizing an oil-supply hole 15 which is provided previously at a nut 13 screwed to a rotary axis for drive 12 of a ball screw device 8 and grease plating is provided at the rotary axis for drive 12 of the ball screw device for restricting occurrence of dust from a lubricant. Also, a spiral part 27 is provided at an intake hose of the intake side elimination means 21 and this spiral part 27 is supported by a supporting means 31 provided in parallel to the rotary axis for drive 12 of the ball screw device 8. It allows the environment of a dust-free room 3 to be maintained easily in a simple construction and an activation device to be shifted smoothly.</p> |
