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发明名称
FILM FORMING METHOD
摘要
申请公布号
JPH0258061(A)
申请公布日期
1990.02.27
申请号
JP19880208982
申请日期
1988.08.23
申请人
MITSUBISHI ELECTRIC CORP
发明人
TANDA TETSUSHI;FUJIOKA HIROFUMI
分类号
B05D1/18;G03F7/16;H01L21/027
主分类号
B05D1/18
代理机构
代理人
主权项
地址
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