PATTERN FORMATION METHOD,申请号JP19880223503-传众专利搜索

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发明名称	PATTERN FORMATION METHOD
摘要
申请公布号	JPH0272624(A)	申请公布日期	1990.03.12
申请号	JP19880223503	申请日期	1988.09.08
申请人	TOSHIBA CORP	发明人	OKUMURA KATSUYA;WATANABE TORU;WATASE MASAMI
分类号	H01L21/302;H01L21/033;H01L21/208;H01L21/3065;H01L21/311;H01L21/316;H01L21/32;H01L21/3213;H01L21/768	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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