THIN FILM FORMING DEVICE,申请号JP19880229307-传众专利搜索

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发明名称	THIN FILM FORMING DEVICE
摘要
申请公布号	JPH0277578(A)	申请公布日期	1990.03.16
申请号	JP19880229307	申请日期	1988.09.12
申请人	MITSUBISHI ELECTRIC CORP	发明人	HARADA SHIGERU
分类号	C23C16/44;C23C16/46;H01L21/205;H01L21/31	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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