| 摘要 |
PURPOSE:To evacuate the inside of a vacuum vessel to a high vacuum by irradiating an oxygen-contg. gas with the UV of a discharge lamp to form an active molecule or an active atom and to decompose org. matter, irradiating an adsorbed product with the IR and UV of the discharge lamp, and degassing the inside of the vessel. CONSTITUTION:The inside of the vacuum vessel 10 is degassed using the discharge lamp 20 radiating UV and IR. An oxygen-contg. gas is introduced into the vessel 10 by a supply mechanism 30, the oxygen-contg. gas is irradiated by the UV from the lamp 20 to generate an active molecule or an active atom, and the org. matter remaining in the vessel 10 is decomposed by the active molecule or active atom. The inside of the vessel 10 is evacuated by an evacuating means 40, the IR and UV from the lamp 20 are projected into the vessel 10 to activate the adsorbed gas molecule in the vessel 10, and the activated gas is evacuated and removed. The inside of the vacuum vessel can be sufficiently degassed to a high vacuum with this simple means. |
