RESISTANCE WIRE HEATING FURNACE,申请号JP19880291612-传众专利搜索

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发明名称	RESISTANCE WIRE HEATING FURNACE
摘要
申请公布号	JPH02137317(A)	申请公布日期	1990.05.25
申请号	JP19880291612	申请日期	1988.11.18
申请人	NEC CORP	发明人	KARITA YUTAKA
分类号	H01L21/677;H01L21/205;H01L21/22;H01L21/68	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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