| 摘要 |
PURPOSE:To improve environmental resistance characteristics by forming an under coating layer of any of a nitride, sulfide, carbide, and fluoride and incorporating oxygen into the contact boundary between the under coating layer and a substrate and near the boundary. CONSTITUTION:The under coating layer 2b is formed of any of the nitride, sulfide, carbide, and fluoride and the oxygen is incorporated into the contact boundary between the under coating layer 2b and the substrate 1a and near the boundary. Namely, the under coating layer 2b is formed by adding gaseous oxygen during sputtering in the initial period of the film formation for the under coating layer, i.e. only in the period when the film desired to be introduced with the oxygen from the substrate 1a surface is formed to a desired thickness. The extremely good environmental characteristics are obtd. in this way without generating problems, such as cracking and peeling. |
