| 摘要 |
<p>PURPOSE:To improve the coupling dislocation accuracy by providing a relative dislocation detecting means of first and second carrying couplings in a magnetic carrying device for semiconductor wafer receiving sealed vessel. CONSTITUTION:A dislocation detecting magnet 6 is provided on the operation bar 2 of an inner coupling 7, and a magnet detecting sensor 11 is disposed on the inner circumferential wall of an outer coupling 8 and in the position facing to the dislocation detecting magnet 6. In this constitution, when the inner and outer couplings 7, 8 are in the normal positional relation, the contact point of the magnetic detecting sensor 11 is closed by the action of the dislocation detecting magnet 6, and an indicator lamp is lighted to display the normal state. When a dislocation occurs, it is extinguished. According to this constitution, even if a vessel such as a wafer road tube 1 receiving the inner coupling 7 is made of an opaque member, for example, a stainless member, the dislocation of the inner and outer couplings 7, 8 can be detected, and various troubles by abnormality of the magnetic carrying device can be prevented.</p> |
