| 摘要 |
PURPOSE:To easily align a groove with a marker and to enhance an accuracy by a method wherein a thin film for alignment marker use is formed so as to expose one part of the groove, as a reference of an alignment operation, in a composite substrate whose groove in a pattern formation face has been filled with a different kind of material. CONSTITUTION:A mask evaporation jig 13 used to shield one part of a groove 2 as a reference in a composite substrate 7 (composed of a ferrite substrate 1 and of the groove 2 filled with a nonmagnetic material such as glass or the like) is placed on the composite substrate 7; a thin film 8 for marker use is formed by an evaporation operation. Thereby, the thin film 8 for marker use is formed in such a way that one part of the groove 2 is exposed. Since one part of the groove 2 is visible, it is possible to complete a marker 12 which aligns the groove 2 with a marker for photomask use easily and with good accuracy. |
