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发明名称
ELEKTRODENANORDNUNG ZUM PLASMAAETZEN UND ZUR PLASMAGESTUETZTEN SCHICHTABSCHEIDUNG
摘要
申请公布号
DD282146(A7)
申请公布日期
1990.09.05
申请号
DD19870311706
申请日期
1987.12.30
申请人
TECHNISCHE UNIVERSITAET KARL-MARX-STADT,DD
发明人
POLL,HANS-ULRICH,DD;STEINRUECKEN,ADELHEID,DD;KAMPFRATH,GERIT,DD
分类号
C23C14/40;(IPC1-7):C23C14/40
主分类号
C23C14/40
代理机构
代理人
主权项
地址
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