COATER,申请号JP19890046961-传众专利搜索

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发明名称	COATER
摘要
申请公布号	JPH02226715(A)	申请公布日期	1990.09.10
申请号	JP19890046961	申请日期	1989.02.28
申请人	TOKYO ELECTRON LTD;TERU KYUSHU KK	发明人	KURODA YUKITERU
分类号	H01L21/30;B05C11/08;G03F7/16;H01L21/027	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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