HIGH-VACUUM APPARATUS

摘要

PURPOSE: To maintain the room temp. of main pumping means of a cryopump during the bake out of a vacuum chamber by providing the main pumping means described above with highly heat transferable guiding means for introducing a coolant into the main pumping means and means for thermally connecting the main pumping means and the guiding means. CONSTITUTION: The cryopump A is connected to the vacuum chamber so as to remove gas from the calcining vacuum chamber. The cryopump A is provided with the main pumping means 12 and 13 maintained at a temp. below room temp. during its ordinary operation. The main pumping means 12 and 13 of the cryopump 12 are provided with the highly heat transferable guiding means 16 (e.g. copper tube) for introducing the coolant (e.g. liquid nitrogen) into the main pumping means 12, 13 and the means 20 (e.g. copper block) for thermally connecting the main pumping means 12 and 13 and the guiding means 16. Consequently, the main pumping means may be maintained in such a manner that their temp. does not rise above room temp. during the bake out of the vacuum chamber.