| 摘要 |
<p>PURPOSE:To prevent chip codes from hindering an inspection by making the inspection to discriminate the identity of chip patterns, then printing the chip codes. CONSTITUTION:A Cr film is first formed on a glass substrate 1 and the many chip patterns 2 are formed by an etching stage, etc., to obtain a mask 3. Whether the respective patterns 2 are exactly patterned or not is then inspected by using a pattern inspecting machine. For example, the chip codes 5a, 5b are respectively printed by using a laser marker after the end of the pattern inspection. The inspection of the patterns 2 is carried out prior to the printing of the codes 5a, 5b in such a manner, by which the inspection by the above- mentioned inspecting machine is enabled.</p> |
