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发明名称
KIBANNOSETSUZOKUKOZO
摘要
申请公布号
JPH0245357(B2)
申请公布日期
1990.10.09
申请号
JP19820108478
申请日期
1982.06.25
申请人
HITACHI LTD
发明人
SOGA TASAO;SUZUKI TAKAYA;SAWAHATA MAMORU;KUSHIMA TADAO
分类号
H05K1/18;H01L21/52;H01L21/60;H05K1/03;H05K3/36;H05K3/46
主分类号
H05K1/18
代理机构
代理人
主权项
地址
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