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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02270331(A)
申请公布日期
1990.11.05
申请号
JP19890091149
申请日期
1989.04.11
申请人
OKI ELECTRIC IND CO LTD
发明人
UMEMURA YOSHIO
分类号
H01L29/73;H01L21/331;H01L21/76
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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