发明名称 Silicon nitride vacuum furnace process
摘要 An improved process of preparing silicon nitride by the direct nitridation of silicon metal is disclosed. The process is a multi-step one which is substantially more efficient than prior processes and produces a silicon nitride having an oxygen content of less than 1%, a silicon metal content of less than 0.5%, and an alpha phase content of at least 85%, preferably at least 90%. The silicon nitride may be converted to a powder.
申请公布号 US4970057(A) 申请公布日期 1990.11.13
申请号 US19900479773 申请日期 1990.02.14
申请人 NORTON COMPANY 发明人 WILLKENS, CRAIG A.;HARTLINE, STEPHEN D.;ARSENAULT, NORMAND P.
分类号 C01B21/068 主分类号 C01B21/068
代理机构 代理人
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