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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH02280352(A)
申请公布日期
1990.11.16
申请号
JP19890101901
申请日期
1989.04.21
申请人
TOSHIBA CORP
发明人
SASAKI TADAHIRO
分类号
H01L21/822;H01L21/82;H01L27/04
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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